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AP Tech，也稱為高級(jí)壓力技術(shù)，是氣體處理部件的制造商，主要是壓力調(diào)節(jié)器和閥門。 AP Tech的長(zhǎng)處是通過超高純度應(yīng)用提供高純度特種氣體的產(chǎn)品。從源容器到使用點(diǎn)，再到處理工具或設(shè)備本身，*，AP Tech產(chǎn)品可提供質(zhì)量，性能和可靠性不受影響的氣體。該公司為服務(wù)和支持設(shè)定了終標(biāo)準(zhǔn)，這些特征現(xiàn)已成為AP Tech品牌的代名詞。
各種各樣的氣體輸送產(chǎn)品可滿足大多數(shù)應(yīng)用。從腐蝕性氣體源面板的挑戰(zhàn)到工藝使用點(diǎn)所需的精細(xì)控制，AP Tech產(chǎn)品在壓力下均可提供高性能。
該公司由行業(yè)人士Rene Zakhour于1987年成立。他的目標(biāo)是制造以服務(wù)和支持為后盾的可靠產(chǎn)品。如今，AP Tech現(xiàn)已成為我們半導(dǎo)體和電子行業(yè)主要市場(chǎng)的*，在他的下，并在他的工作中追求的敦促下，我們繼續(xù)努力實(shí)現(xiàn)Rene的目標(biāo)。就這么簡(jiǎn)單。

美國APTECH調(diào)節(jié)器AZ 1000系列畢爾途專業(yè)高

壓力調(diào)節(jié)器
AP Tech的各種調(diào)節(jié)器的入口壓力范圍高達(dá)10,000 psig（690 bar），輸送壓力從壓力到10,000 psig（690 bar）。流量也有很大的范圍，從幾sccm到數(shù)千slpm。無論是手動(dòng)彈簧加載還是氣動(dòng)驅(qū)動(dòng)，連接尺寸為1/8英寸至1英寸，AP Tech都是通過超高純氣體輸送實(shí)現(xiàn)高純度的優(yōu)選調(diào)節(jié)器。

Operating Parameters

Source pressure vacuum to 3,500 psig (241 bar)

AZ 1001 and TF option vacuum to 300 psig (21 bar)

Delivery pressure AZ 1001 1 to 10 psig (0.07 to 0.7 bar)

AZ 1002 1 to 30 psig (0.07 to 2 bar)

AZ 1006 2 to 60 psig (0.14 to 4 bar)

AZ 1010 2 to 100 psig (0.14 to 7 bar)

AZ 1015 5 to 150 psig (.34 to 10 bar)

AZ 1030 5 to 300 psig (.34 to 21 bar)

Proof pressure 150% of operating pressures

Burst pressure 300% of operating pressures

 

SS 316L construction

? 10 μin. surface finish(25 μin. optional)

? Vacuum to 3500 psig(241 bar) inlet

? 1 to 300 psig (0.07 to 21bar) outlet

? Cleaned, assembled and packaged for high purity semiconductor applications

? Flow rates- Standard to 30 slpm - HF option to 120 slpm

? Regulator of choice for point of use applications

? Knob LOTO (refer to AP KL data sheet)

? Installation and operating instructions available at

美國APTECH調(diào)節(jié)器AZ 1000系列畢爾途專業(yè)高

in the Tech Briefs section

 

 

Other Parameters

Inlet/outlet connectors 1/4 or 3/8 inch face seal or tube weld

Flow coefficient (Cv) 0.09 (0.15 HF option)

Internal volume 0.49 in3 (8 cm3)

Operating temperature -40° to +160°F (-40° to +71°C)*

Surface finish 10 μin. (0.25 μm) Ra avg. standard

25 μin. (0.62 μm) Ra avg. optional

Inboard leakage 2 x 10-10 sccs

Outboard leakage 2 x 10-9 sccs He

Leakage across seat 4 x 10-8 sccs He

Installation surface or panel (optional)

Supply pressure effect 0.25 psig per 100 psig source pressure change

HF 0.75 psig per 100 psig source pressure change

 

材質(zhì)：316不銹鋼

Sample Order Number AZ 1010SQ 2PW FV4 FV4

AZ1010S3PWFV4MV40
AZ1010S2PWFV4MV4

AZ1010S 2PW FV4 MV4

AZ 1010 | Series

 

AZ 1001 = 1-10 psig (.07 to .7 bar)

AZ 1002 = 1-30 psig (.07 to 2 bar)

AZ 1006 = 2-60 psig (.14 to 4 bar)

AZ 1010 = 2-100 psig (.14 to 7 bar)

AZ 1015 = 5-150 psig (.34 to 10 bar)

AZ 1030 = 5-300 psig (.34 to 21 bar)

S | Material

 

S = Stainless steel (SS)

SHP = SS/Ni-Cr-Mo alloy poppet and

S diaphragm

Q | Surface

Finish Option

Q = 25 μin. Ra avg.

2PW | Ports

2PW = 2 ports butt weld

3PW = 3 ports butt weld

4PW = 4 ports butt weld

 

FV4 FV4 | Connections

Inlet / Outlet

FV4 = 1/4 inch face seal female

MV4 = 1/4 inch face seal male

FV6 = 3/8 inch face seal female

MV6 = 3/8 inch face seal male

Tube weld stub available

Delivery

Gauge*

 

0 = No gauge

V3 = 30-0-30 psig/bar

L = 30-0-60 psig/bar

1 = 0-100 psig/bar

H = 30-0-160 psig/bar

4 = 0-400 psig/bar

10 = 0-1000 psig/bar

40 = 0-4000 psig/bar

* Standard gauge port is 1/4 inch face seal male

(1/4 inch face seal female are available).

Options

VS = Polyimide seat

TF = PTFE seat

HF = High flow

P = Panel installation**

KL = Knob LOTO (refer to AP KL data sheet)

** Panel hole 1.569 diameter.